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- Marinescu, O. (author), Bociort, F. (author) journal article 2008
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- Marinescu, O. (author), Bociort, F. (author) journal article 2008
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Marinescu, O. (author), Bociort, F. (author)The merit function space of mirror system for extreme ultraviolet (EUV) lithography is studied. Local minima situated in the multidimensional optical merit function space are connected via links that contain saddle points and form a network. We present networks for EUV lithographic objective designs and discuss how these networks change when...journal article 2007
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Marinescu, O. (author), Bociort, F. (author)Optical designers often insert or split lenses in existing designs. Here, we present, with examples from Deep and Extreme UV lithography, an alternative method that consists of constructing saddle points and obtaining new local minima from them. The method is remarkable simple and can therefore be easily integrated with the traditional design...conference paper 2006
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Marinescu, O. (author), Bociort, F. (author)The multidimensional merit function space of complex optical systems contains a large number of local minima that are connected via links that contain saddle points. In this work, we illustrate a method to construct such saddle points with examples of deep UV objectives and extreme UV mirror systems for lithography. The central idea of our...conference paper 2005