Hydrogenated Indium Oxide (IO:H) by Plasma Enhanced Spatial Atomic layer deposition for thin film PV application

Hydrogenated Indium Oxide (IOH) has been recognized as a high performance transparent conductive oxide (TCO) due to its excellent mobility (>100 cm2/Vs) and high transparency (>90%) in the visible and near infrared region of the spectrum. Plasma enhanced spatial atomic layer deposition (PESALD), a new type of deposition process developed...