Searched for: author%3A%22Pereira%2C+S.F.%22
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Kolenov, D. (author), Pereira, S.F. (author)
For the development of integrated circuits, the accompanying metrology inside the fabrication process is essential. Non-imaging metrology of nanostructure has to be quick and non-destructive. The multilayers are crucial components of today's microprocessor nanostructures and reflective coatings. Coherent Fourier scatterometry (CFS), which is...
conference paper 2023
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Dou, X. (author), Zhou, Jiakang (author), Zhang, Yuquan (author), Min, Changjun (author), Pereira, S.F. (author), Yuan, Xiaocong (author)
Optical singularities indicate zero-intensity points in space where parameters, such as phase, polarization, are undetermined. Vortex beams such as the Laguerre–Gaussian modes are characterized by a phase factor e<sup>il</sup><sup>θ</sup>, and contain a phase singularity in the middle of its beam. In the case of a transversal optical...
journal article 2023
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Lopez Rodriguez, B. (author), van der Kolk, R.J.H. (author), Aggarwal, Samarth (author), Sharma, N. (author), Li, Z.Z.L. (author), van der Plaats, D.W. (author), Scholte, T.C. (author), Chang, J. (author), Groeblacher, S. (author), Pereira, S.F. (author), Bhaskaran, Harish (author), Esmaeil Zadeh, I.Z. (author)
Integrated photonic platforms have proliferated in recent years, each demonstrating its unique strengths and shortcomings. Given the processing incompatibilities of different platforms, a formidable challenge in the field of integrated photonics still remains for combining the strengths of different optical materials in one hybrid integrated...
journal article 2023
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Ortolano, Giuseppe (author), Paniate, Alberto (author), Boucher, Pauline (author), Napoli, Carmine (author), Soman, S. (author), Pereira, S.F. (author), Ruo-Berchera, Ivano (author), Genovese, Marco (author)
Quantum entanglement and squeezing have significantly improved phase estimation and imaging in interferometric settings beyond the classical limits. However, for a wide class of non-interferometric phase imaging/retrieval methods vastly used in the classical domain, e.g., ptychography and diffractive imaging, a demonstration of quantum...
journal article 2023
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Paul, A. (author), Kolenov, D. (author), Scholte, T.C. (author), Pereira, S.F. (author)
Detecting defects on diffraction gratings is crucial for ensuring their performance and reliability. Practical detection of these defects poses challenges due to their subtle nature.We performnumerical investigations and demonstrate experimentally the capability of coherent Fourier scatterometry (CFS) to detect particles as small as 100 nm...
journal article 2023
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Soman, S. (author), Pereira, S.F. (author), El Gawhary, O. (author)
In recent years, a lot of works have been published that use parameter retrieval using orbital angular momentum (OAM) beams. Most make use of the OAM of different Laguerre-Gauss modes. However, those specific optical beams are paraxial beams and this limits the regime in which they can be used. In this paper, we report on the first results on...
journal article 2022
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Chang, J. (author), Los, Johannes W.N. (author), Gourgues, Ronan (author), Steinhauer, Stephan (author), Dorenbos, S.N. (author), Pereira, S.F. (author), Urbach, Paul (author), Zwiller, Val (author), Esmaeil Zadeh, I.Z. (author)
Shortly after their inception, superconducting nanowire single-photon detectors (SNSPDs) became the leading quantum light detection technology. With the capability of detecting single-photons with near-unity efficiency, high time resolution, low dark count rate, and fast recovery time, SNSPDs outperform conventional single-photon detection...
journal article 2022
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Yin, Haoyang (author), Kolenov, D. (author), Pereira, S.F. (author)
We demonstrate that the sensitivity of nanoparticle detection on surfaces can be substantially improved by implementing synthetic optical holography (SOH) in coherent Fourier scatterometry (CFS), resulting in a phase-sensitive confocal differential detection technique that operates at very low power level (P=0.016 mW). The improvement in...
journal article 2022
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Dou, X. (author), Min, Changjun (author), Zhang, Yuquan (author), Pereira, S.F. (author), Yuan, Xiaocong (author)
Accurate determination of the physical parameters of nanostructures from optical far-field scattering is an important and challenging topic in the semiconductor industry. Here, we propose a novel metrology method to determine simultaneously the height and side-wall angle of a step-shaped silicon nanostructure. By employing an optical singular...
journal article 2022
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Chang, J. (author), Los, J. W.N. (author), Tenorio Pearl, J.O. (author), Noordzij, N. (author), Gourgues, R.B.M. (author), Guardiani, A. (author), Zichi, J. R. (author), Pereira, S.F. (author), Urbach, Paul (author), Zwiller, V. (author), Dorenbos, S.N. (author), Esmaeil Zadeh, I.Z. (author)
Single photon detectors are indispensable tools in optics, from fundamental measurements to quantum information processing. The ability of superconducting nanowire single photon detectors (SNSPDs) to detect single photons with unprecedented efficiency, short dead time, and high time resolution over a large frequency range enabled major...
journal article 2021
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Dou, X. (author), Pereira, S.F. (author), Min, Changjun (author), Zhang, Yuquan (author), Meng, P. (author), Urbach, Paul (author), Yuan, Xiaocong (author)
The sidewall angle (SWA) of a nanostructure exerts influence on the performance of the nanostructure and plays an important role in processing nano-structural chips. It is still a great challenge to determine steep SWAs from far field measurements especially when the SWAs are close to 90°. Here, we propose a far-field detection system to...
journal article 2021
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Kolenov, D. (author), Esmaeil Zadeh, I.Z. (author), Horsten, R.C. (author), Pereira, S.F. (author)
Coherent Fourier scatterometry (CFS) has been introduced to fulfil the need for noninvasive and sensitive inspection of subwavelength nanoparticles in the far field. The technique is based on detecting the scattering of coherent light when it is focused on isolated nanoparticles. In the present work, we describe the results of an experimental...
journal article 2021
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Šiaudinyte, L. (author), Pereira, S.F. (author)
As the semiconductor industry rapidly approaches the 3nm lithography node, on product overlay (OPO) requirements have become tighter and as a result, residuals magnitude requirements have become even more challenging. Metrology performance enhancements are required to meet these demands. Color Per Layer (CPL) is a unique imaging overlay...
conference paper 2020
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Meng, P. (author), Pham, Hong Liên (author), Pereira, S.F. (author), Urbach, Paul (author)
Lateral resolution enhancement is demonstrated in a confocal imaging system with amplitude-modulated radially polarized (RP) light at the wavelength Annular pupil fields and optimized amplitude distribution functions can be realized with a spatial light modulator. By comparing images obtained with full and amplitude modulated apertures of RP...
journal article 2020
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Elsinger, Lukas (author), Gourgues, R.B.M. (author), Esmaeil Zadeh, I.Z. (author), Maes, Jorick (author), Guardiani, A. (author), Bulgarini, G. (author), Pereira, S.F. (author), Dorenbos, S.N. (author), Zwiller, Val (author)
Future quantum optical networks will require an integrated solution to multiplex suitable sources and detectors on a low-loss platform. Here we combined superconducting single-photon detectors with colloidal PbS/CdS quantum dots (QDs) and low-loss silicon nitride passive photonic components to show their combined operation at cryogenic...
conference paper 2020
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Kolenov, D. (author), Meng, P. (author), Pereira, S.F. (author)
We report a novel method of focus determination with high sensitivity and submicrometre accuracy. The technique relies on the asymmetry in the scattered far field from a nanosphere located at the surface of interest. The out-of-focus displacement of the probing beam manifests itself in imbalance of the signal of the differential detector...
journal article 2020
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Kolenov, D. (author), Pereira, S.F. (author)
We present an efficient machine learning framework for detection and classification of nanoparticles on surfaces that are detected in the far-field with coherent Fourier scatterometry (CFS). We study silicon wafers contaminated with spherical polystyrene (PSL) nanoparticles (with diameters down to λ/8). Starting from the raw data, the proposed...
journal article 2020
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Kolenov, D. (author), Urbach, Paul (author), Pereira, S.F. (author)
We demonstrate the far field detection of low-contrast nanoparticles on surfaces using a technique that is based on evanescent-wave amplification due to a thin dielectric layer that is deposited on the substrate. This research builds upon earlier results where scattering enhancement of 200 nm polystyrene (PSL) particles on top of a glass...
journal article 2020
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Heemels, Alex (author), Agbana, T.E. (author), Pereira, S.F. (author), Diehl, J.C. (author), Verhaegen, M.H.G. (author), Vdovin, Gleb (author)
Fourier Ptychography is a computational imaging technique able to decouple high resolution from wide field of view, bypassing the diffraction limit of the microscope. Since it does not rely on high precision mechanics or fluorescent imaging, it is of practical interest for implementation in low scale devices. Despite its gains, realizing a...
conference paper 2020
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Šiaudinyte, L. (author), Pereira, S.F. (author)
Optical inspection of periodic nanostructures is a major challenge in the semiconductor industry due to constantly decreasing critical dimensions. In this paper we combine coherent Fourier scatterometry (CFS) with a sectioning mask for subwavelength grating parameter determination. By selecting only the most sensitive regions of the scattered...
journal article 2020
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