Searched for: author%3A%22SHI%2C+XIAOTONG%22
(1 - 1 of 1)
document
SHI, XIAOTONG (author)
In the ASML test system, all activity events of the test are continuously recorded in event logs, and these logs are intended to help people diagnose the root cause of a failure. However, due to the large scale of the logs, manual inspection of these logs consumes lots of effort and time, and the lack of expert knowledge of engineers makes the...
master thesis 2019