Searched for: author%3A%22Sadeghian+Marnani%2C+H.%22
(1 - 15 of 15)
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Keyvani Janbahan, A. (author), Sadeghian Marnani, H. (author), Tamer, M.S. (author), Goosen, J.F.L. (author), van Keulen, A. (author)
Due to the harmonic motion of the cantilever in Tapping Mode Atomic Force Microscopy, it is seemingly impossible to estimate the tip-sample interactions from the motion of the cantilever. Not directly observing the interaction force, it is possible to damage the surface or the tip by applying an excessive mechanical load. The tip-sample...
journal article 2017
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Bijster, R.J.F. (author), Sadeghian Marnani, H. (author), van Keulen, A. (author)
abstract 2016
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Bijster, R.J.F. (author), Sadeghian Marnani, H. (author), van Keulen, A. (author)
poster 2016
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Bijster, R.J.F. (author), Sadeghian Marnani, H. (author), van Keulen, A. (author)
abstract 2016
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Bijster, R.J.F. (author), Herfst, R. (author), Klop, W (author), Hagen, R. (author), Sadeghian Marnani, H. (author)
poster 2016
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Bijster, R.J.F. (author), Klop, W (author), Hagen, R. (author), Sadeghian Marnani, H. (author)
abstract 2016
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Tamer, M.S. (author), Sadeghian Marnani, H. (author), Keyvani Janbahan, A. (author), Goosen, J.F.L. (author), van Keulen, A. (author)
abstract 2016
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Nanda, G. (author), Veldhoven, E. van (author), Maas, D. (author), Herfst, R. (author), Sadeghian Marnani, H. (author), Alkemade, P.F.A. (author)
abstract 2016
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Bijster, R.J.F. (author), Sadeghian Marnani, H. (author), van Keulen, A. (author)
Optical near-field technologies such as solid immersion lenses and hyperlenses are candidate solutions for high resolution and high throughput wafer inspection and metrology for the next technology nodes. Besides sub-diffraction limited optical performance, these concepts share the necessity of extreme proximity to the sample at distances that...
conference paper 2016
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Keyvani Janbahan, A. (author), Sadeghian Marnani, H. (author), Goosen, J.F.L. (author), van Keulen, A. (author)
The maximum amount of repulsive force applied to the surface plays a very important role in damage of tip or sample in Atomic Force Microscopy(AFM). So far, many investigations have focused on peak repulsive forces in tapping mode AFM in steady state conditions. However, it is known that AFM could be more damaging in transient conditions. In...
conference paper 2015
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Herfst, R. (author), Dekker, B. (author), Witvoet, G. (author), Crowcombe, W.E. (author), de Lange, D. (author), Sadeghian Marnani, H. (author)
One of the major limitations in the speed of the atomic force microscope (AFM) is the bandwidth of the mechanical scanning stage, especially in the vertical (z) direction. According to the design principles of “light and stiff” and “static determinacy,” the bandwidth of the mechanical scanner is limited by the first eigenfrequency of the AFM...
journal article 2015
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Bijster, R. (author), De Vreugd, J. (author), Sadeghian Marnani, H. (author)
In photo-thermal actuation, heat is added locally to a micro-cantilever by means of a laser. A fraction of the irradiation is absorbed, yielding thermal stresses and deformations in the structure. Harmonic modulation of the laser power causes the cantilever to oscillate. Moreover, a phase lag is introduced which is very sensitive to the spot...
journal article 2014
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Sadeghian Marnani, H. (author), Herfst, R.W. (author), Van den Dool, T.C. (author), Crowcombe, W.E. (author), Winters, J. (author), Kramer, G.F.I.J. (author)
Scanning probe microscopy (SPM) is a promising candidate for accurate assessment of metrology and defects on wafers and masks, however it has traditionally been too slow for high-throughput applications, although recent developments have significantly pushed the speed of SPM [1,2]. In this paper we present new results obtained with our...
conference paper 2014
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Sadeghian Marnani, H. (author), Van den Dool, T.C. (author), Crowcombe, W.E. (author), Herfst, R.W. (author), Winters, J. (author), Kramer, G.F.I.J. (author), Koster, N.B. (author)
With the device dimensions moving towards the 1X node, the semiconductor industry is rapidly approaching the point where 10 nm defects become critical. Therefore, new methods for improving the yield are emerging, including inspection and review methods with sufficient resolution and throughput. Existing industrial tools cannot anymore fulfill...
conference paper 2014
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Sadeghian Marnani, H. (author)
doctoral thesis 2010
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