Minimizing tip-sample forces and enhancing sensitivity in atomic force microscopy with dynamically compliant cantilevers

A new horizon: Using heat to measure distance in high performance metrology solutions

Reduction of laser diode intensity noise in optical beam defection systems

Towards an effective reduction of intensity noise in laser diodes

Quantitative measurement of tip-sample interaction forces in tapping mode atomic force microscopy

Helium-ion-beam-induced growth of 3-dimensional AFM probes

Non-contact distance measurement and profilometry using thermal near-field radiation towards a high resolution inspection and metrology solution

Meta-instrument: An opto-mechanical platform for imaging near-field optical instruments

Meta-instrument: An opto-mechanical platform for imaging near-field optical instruments

A miniaturized, high frequency mechanical scanner for high speed atomic force microscope using suspension on dynamically determined points

Transient tip-sample interactions in high-speed AFM imaging of 3D nano structures

Phase lag deduced information in photo-thermal actuation for nano-mechanical systems characterization

High-throughput parallel SPM for metrology, defect, and mask inspection

Parallel, Miniaturized Scanning Probe Microscope for Defect Inspection and Review

Mechanics of Ultra-sensitive Nanoelectromechanical Silicon Cantilevers: A Combined Experimental-Theoretical Approach