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van Neer, P.L.M.J. (author), Quesson, B. (author), van Es, M.H. (author), Van Riel, M. (author), Hatakeyama, K. (author), Mohtashami, A. (author), Piras, D. (author), Duivenoorde, T. (author), Lans, M. (author), Sadeghian, H. (author)
The characterization of buried nanoscale structures nondestructively is an important challenge in a number of applications, such as defect detection and metrology in the semiconductor industry. A promising technique is Subsurface Scanning Probe Microscopy (SSPM), which combines ultrasound with Atomic Force Microscopy (AFM). Initially, SSPM...
journal article 2019