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Hooijschuur, R.H.T. (author), Saikumar, N. (author), Hassan HosseinNia, S. (author), van Ostayen, R.A.J. (author)
This paper presents the development of a contactless sensing system and the dynamic evaluation of an air-bearing based precision wafer positioning system. The contactless positioning stage is a response to the trend seen in the high-tech industry, where the substrates are becoming thinner and larger to reduce the cost and increase the yield....
journal article 2022
document
Hooijschuur, R.H.T. (author), Saikumar, N. (author), Hassan HosseinNia, S. (author), van Ostayen, R.A.J. (author)
This paper presents the development of a contactless sensing system and the dynamic evaluation of an air-bearing-based precision wafer positioning system. The contactless positioning stage is a response to the trend seen in the high-tech industry, where the substrates are becoming thinner and larger to reduce the cost and increase the yield....
journal article 2021