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- Puspitasari, I. (author), Saputra, P. (author), Morana, B. (author), Mele, L. (author), Santagata, F. (author), Creemer, J.F. (author), Kapteijn, F. (author), Kooyman, P.J. (author) journal article 2012
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Mele, L. (author), Rossi, T. (author), Riccio, M. (author), Iervolino, E. (author), Santagata, F. (author), Irace, A. (author), Breglio, G. (author), Creemer, J.F. (author), Sarro, P.M. (author)This paper presents a microhotplate working up to 1200 °C with improved temperature uniformity by optimizing the geometry of the thin-film resistor. By varying the linewidth of meandering resistive tracks, heat is generated in such a way to have more homogenous temperature distribution. The microhotplates are fabricated using molybdenum as...journal article 2011
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Creemer, J.F. (author), Pandraud, G. (author), Santagata, F. (author)The invention relates to a method of manufacturing a micro unit for use in a microscope. The method comprises the step of providing a planar substrate supporting structure and creating a chamber in the supporting structure for receiving a fluid containing a chemically reacting substance to be inspected. Further, the method comprises the step of...patent 2011
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Mele, L. (author), Santagata, F. (author), Panraud, G. (author), Morana, B. (author), Tichelaar, F.D. (author), Creemer, J.F. (author), Sarro, P.M. (author)This paper presents a new process for the fabrication of MEMS-based nanoreactors for in situ atomic-scale imaging of nanoparticles under relevant industrial conditions. The fabrication of the device is completed fully at wafer level in an ISO 5 clean room and it is based on silicon fusion bonding and thin film encapsulation for sealed lateral...journal article 2010