Frota Sartori, A. (author), Belardinelli, P. (author), Dolleman, R.J. (author), Steeneken, P.G. (author), Ghatkesar, M.K. (author), Buijnsters, J.G. (author) Diamond is a highly desirable material for state-of-the-art micro-electromechanical (MEMS) devices, radio-frequency filters and mass sensors, due to its extreme properties and robustness. However, the fabrication/integration of diamond structures into Si-based components remain costly and complex. In this work, a lithography-free, low-cost...
journal article 2019