Khosropanah, P (author), Suzuki, T. (author), Ridder, M. L. (author), Hijmering, R. A. (author), Akamatsu, H. (author), Gottardi, L (author), Van Der Kuur, J. (author), Gao, J.R. (author), Jackson, B. D. (author) SRON is developing ultra-low noise Transition Edge Sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for the SAFARI instrument aboard the SPICA mission. We successfully fabricated TESs with very narrow (0.5-0.7 μm) and thin (0.25 μm) SiN legs on different sizes of SiN islands using deep...
conference paper 2016
