Cartamil Bueno, S.J. (author), Steeneken, P.G. (author), Tichelaar, F.D. (author), Navarro Moratalla, E. (author), Venstra, W.J. (author), Leeuwen, R. (author), Coronado, E. (author), Van der Zant, H.S.J. (author), Steele, G.A. (author), Castellanos-Gomez, A. (author) Controlling the strain in two-dimensional (2D) materials is an interesting avenue to tailor the mechanical properties of nanoelectromechanical systems. Here, we demonstrate a technique to fabricate ultrathin tantalum oxide nanomechanical resonators with large stress by the laser oxidation of nano-drumhead resonators composed of tantalum...
journal article 2015
