Searched for: author:"Van Veghel, M."
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Bodermann, B. (author), Buhr, E. (author), Danzebrink, H.U. (author), Bär, M. (author), Scholze, F. (author), Krumrey, M. (author), Wurm, M. (author), Klapetek, P. (author), Hansen, P.E. (author), Korpelainen, V. (author), Van Veghel, M. (author), Yacoot, A. (author), Siitonen, S. (author), El Gawhary, O. (author), Burger, S. (author), Saastamoinen, T. (author)
Supported by the European Commission and EURAMET, a consortium of 10 participants from national metrology institutes, universities and companies has started a joint research project with the aim of overcoming current challenges in optical scatterometry for traceable linewidth metrology. Both experimental and modelling methods will be enhanced...
conference paper 2011
document
Van Veghel, M. (author), Wassenberg, F. (author)
book 1999
document
Van Veghel, M. (author), Wassenberg, F. (author)
book 1999
document
Van Veghel, M. (author)
book 1999
document
Van Veghel, M. (author), Wassenberg, F. (author)
book 1999
document
Van Veghel, M. (author), Wassenberg, F. (author)
book 1999
document
Van der Zon, F. (author), Van Veghel, M. (author)
book 1998
Searched for: author:"Van Veghel, M."
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