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Query

  • (-) author:"Van den Dool, T.C."

Collection

  • Institutional Repository (3)

Document type

  • conference paper (2)
  • journal article (1)

Subject

  • defect inspection (2)
  • mask inspection (2)
  • Scanning Probe Microscopy (1)
  • acousto-optical materials (1)
  • defect review (1)
  • experimental physics (1)
  • high-throughput metrology (1)
  • miniaturized SPM (1)
  • optical sensing and sensors (1)
  • optomechanics (1)
  • parallel SPM (1)
  • patterned wafer inspection (1)
  • semiconductor materials (1)
  • wavelength filtering devices (1)
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Author

  • Van den Dool (3)
  • Crowcombe (2)
  • Herfst (2)
  • Kramer (2)
  • Sadeghian Marnani (2)
  • Winters (2)
  • Harmsma (1)
  • Koster (1)
  • Leinders (1)
  • Pozo (1)
  • Schmits (1)
  • Tabak (1)
  • Urbach (1)
  • Van Dongen (1)
  • Westerveld (1)
  • Yousefi (1)
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Date

2012 - 2015
(years)
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Format: 2023/05/31
Searched for: author%3A%22Van+den+Dool%2C+T.C.%22
(1 - 3 of 3)
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High-throughput parallel SPM for metrology, defect, and mask inspection
High-throughput parallel SPM for metrology, defect, and mask inspection
Parallel, Miniaturized Scanning Probe Microscope for Defect Inspection and Review
Parallel, Miniaturized Scanning Probe Microscope for Defect Inspection and Review
Characterization of a photonic strain sensor in silicon-on-insulator technology
Characterization of a photonic strain sensor in silicon-on-insulator technology
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