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Query

  • (-) author:"Winters, J."

Collection

  • Institutional Repository (2)

Document type

  • conference paper (2)

Subject

  • defect inspection (2)
  • mask inspection (2)
  • Scanning Probe Microscopy (1)
  • defect review (1)
  • high-throughput metrology (1)
  • miniaturized SPM (1)
  • parallel SPM (1)
  • patterned wafer inspection (1)

Author

  • Crowcombe (2)
  • Herfst (2)
  • Kramer (2)
  • Sadeghian Marnani (2)
  • Van den Dool (2)
  • Winters (2)
  • Koster (1)

Date

2014 - 2015
(years)
Specify date range: Show
Format: 2023/06/10
Searched for: author%3A%22Winters%2C+J.%22
(1 - 2 of 2)
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High-throughput parallel SPM for metrology, defect, and mask inspection
High-throughput parallel SPM for metrology, defect, and mask inspection
Parallel, Miniaturized Scanning Probe Microscope for Defect Inspection and Review
Parallel, Miniaturized Scanning Probe Microscope for Defect Inspection and Review
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