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Ayerden, N.P. (author), Ghaderi, M. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)The design, fabrication and characterization of a highly integrated optical gas sensor is presented. The gas cell takes up most of the space in a microspectrometer and is the only component that has so far not been miniaturized. Using the tapered resonator cavity of a linear variable optical filter as a gas cell enables ultimate miniaturization,...conference paper 2015
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Ghaderi, M. (author), Ayerden, N.P. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)In CMOS-compatible optical filter designs, SiO2 is often used as the low-index material, limiting the optical contrast (nHi/nLo) to about 2. Using the air as low-index material improves the optical contrast by about 50%, thus increasing the reflectivity and bandwidth at a given design complexity. The design and fabrication of a 4-layered air...journal article 2014