Method for determining a spring constant for a deformable scanning probe microscope element, and scanning probe microscope and calibration device arranged for determining a spring constant for a probe element

A method for determining a spring constant k for a deformable probe element (102) of a scanning probe microscope SPM (100). The probe (102) has an outer surface area consisting of a tip area (112) on a first probe side (108) and a tip-less area (113). The probe (102) also has a probe electrode (114) and a scanning probe tip (104) in the tip area...

From MEMS to NEMS: Scaling Cantilever Sensors

This thesis studies the effects of scaling on the characterisation and readout of micro-electro mechanical systems (MEMS) to nano-electro mechanical systems (NEMS). In particular it focuses on cantilever, which is a basic device building block and an important transducer in many sensing applications. This thesis presents an overview of major...

Some considerations of effects-induced errors in resonant cantilevers with the laser deflection method

Micro/nano resonant cantilevers with a laser deflection readout have been very popular in sensing applications over the past years. Despite the popularity, however, most of the research has been devoted to increasing the sensitivity, and very little attention has been focused on effects-induced errors. Among these effects, the surface effects...

Effects of size and defects on the elasticity of silicon nanocantilevers

The size-dependent elastic behavior of silicon nanocantilevers and nanowires, specifically the effective Young’s modulus, has been determined by experimental measurements and theoretical investigations. The size dependence becomes more significant as the devices scale down from micro- to nano-dimensions, which has mainly been attributed to...

Transient effects of tendon disconnection of a TLP by hull-tendon-riser coupled dynamic analysis

Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in instability

This letter presents the application of electrostatic pull-in instability to study the size-dependent effective Young’s Modulus ? ( ~170–70?GPa) of [110] silicon nanocantilevers (thickness ~1019–40?nm). The presented approach shows substantial advantages over the previous methods used for characterization of nanoelectromechanical systems...