Molecular simulation strategy for mechanical modeling of amorphous/porous low-dielectric constant materials

We propose an amorphous/porous molecular connection network generation algorithm for simulating the material stiffness of a low-k material (SiOC:H). Based on a given concentration of the basic building blocks, this algorithm will generate an approximate and large amorphous network. The molecular topology is obtained by distributing these blocks...

The chemical-mechanical relationship of the SiOC(H) dielectric film

Multi-scale energy-based failure modeling of bond pad structures