Design of a calorimeter for near-field heat transfer measurements and thermal scanning probe microscopy

Multilayer cantilever beams are used in the measurement of near-field radiative heat transfer. The materials and dimensions of the cantilever probe are chosen in order to improve system performance in terms of sensitivity and noise. This is done using an analytical model that describes the thermo-mechanical and mechanical behavior of the...

A new horizon: Using heat to measure distance in high performance metrology solutions

Towards an effective reduction of intensity noise in laser diodes

Reduction of laser diode intensity noise in optical beam defection systems

Non-contact distance measurement and profilometry using thermal near-field radiation towards a high resolution inspection and metrology solution

Optical near-field technologies such as solid immersion lenses and hyperlenses are candidate solutions for high resolution and high throughput wafer inspection and metrology for the next technology nodes. Besides sub-diffraction limited optical performance, these concepts share the necessity of extreme proximity to the sample at distances that...