Searched for: author:"van Zeijl, H.W."
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Middelburg, L.M. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Morana, B. (author), Zhang, Kouchi (author)
This work focusses on the design and fabrication of surface micromachined pressure sensors, designed in a modular way for the integration with analog front-end read-out electronics. Polycrystalline 3C silicon carbide (SiC) was used to fabricate free-standing high topography cavities exploiting surface micromaching. The poly-SiC was in-situ...
journal article 2020
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Mo, J. (author), Middelburg, L.M. (author), Morana, B. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Zhang, Kouchi (author)
The application of pressure sensors in harsh environments is typically hindered by the stability of the material over long periods of time. This work focuses on the design and fabrication of surface micromachined Pirani gauges which are designed to be compatible with state-of-the-art Silicon Carbide CMOS technology. Such an integrated platform...
journal article 2020
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Romijn, J. (author), Vollebregt, S. (author), van Zeijl, H.W. (author), Sarro, P.M. (author)
In this paper we present, for the first time, the successful monolithic wafer-scale integration of CVD graphene with CMOS logic for highly miniaturized smart sensing structures with on-chip readout electronics. The use of a patterned CMOS compatible catalyst for pre-defined regions of CVD graphene growth, and the transfer-free process used,...
conference paper 2019
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Mirza Gheytaghi, Amir (author), Vollebregt, S. (author), Poelma, René H. (author), van Zeijl, H.W. (author), Zhang, Kouchi (author)
poster 2019
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el Mansouri, B. (author), Middelburg, L.M. (author), Poelma, René H. (author), Zhang, Kouchi (author), van Zeijl, H.W. (author), Wei, J. (author), Jiang, H. (author), Vogel, J.G. (author), van Driel, W.D. (author)
Commercially available gravimeters and seismometers can be used for measuring Earth’s acceleration at resolution levels in the order of ng∕Hz (where g represents earth’s gravity) but they are typically high-cost and bulky. In this work the design of a bulk micromachined MEMS device exploiting non-linear buckling behaviour is described, aiming...
journal article 2019
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Kluba, M.M. (author), Morana, B. (author), Savov, A.M. (author), van Zeijl, H.W. (author), Pandraud, G. (author), Dekker, R. (author)
We present a novel, wafer-based fabrication process that enables integration and assembly of electronic components, such as ASICs and decoupling capacitors, with flexible interconnects. The electronic components are fabricated in, or placed on precisely defined and closely-spaced silicon islands that are connected by interconnects embedded in...
journal article 2018
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Middelburg, L.M. (author), el Mansouri, B. (author), Poelma, R.H. (author), Zhang, G.Q. (author), van Zeijl, H.W. (author), Wei, J. (author)
This work describes the design, modelling and realisation of the mechanical part of a non-linear MEMS accelerometer intended for large displacement behaviour. For this, a mass/spring system was designed with an extremely low resonance frequency. In this work the mechanical behaviour was verified by measurements done using an optical setup,...
conference paper 2018
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Middelburg, L.M. (author), el Mansouri, B. (author), Poelma, R.H. (author), van Zeijl, H.W. (author), Wei, J. (author), Zhang, G.Q. (author), van Driel, W.D. (author)
The mechanical part of inertial sensors can be designed to have a large mechanical sensitivity, but also requires the transduction mechanism which translates this displacement. The overall system resolution in mechanical inertial sensors is dictated by the noise contribution of each stage and the magnitude of each sensitivity, see also Figure...
conference paper 2018
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Cordeiro Guerrieri, D. (author), De Athayde Costa E Silva, M. (author), van Zeijl, H.W. (author), Cervone, A. (author), Gill, E.K.A. (author)
Three low pressure micro-resistojets (LPM) with integrated heater and temperature measurement were designed, manufactured and characterized at Delft university of technology. The devices were manufactured using silicon-based micro electro mechanical systems (MEMS) technology including a heater made of molybdenum for better operations at high...
journal article 2017
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de Athayde Costa e Silva, M. (author), Cordeiro Guerrieri, D. (author), van Zeijl, H.W. (author), Cervone, A. (author), Gill, E.K.A. (author)
This paper presents the results of design, manufacturing and characterization of Vaporizing Liquid Microthrusters (VLM) with integrated molybdenum heaters and temperature sensing. The thrusters use water as the propellant and are designed for use in CubeSats and PocketQubes. The devices are manufactured using silicon based MEMS (Micro Electro...
journal article 2017
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Koladouz Esfahani, Z. (author), Tohidian, M. (author), van Zeijl, H.W. (author), Kolahdouz, Mohammadreza (author), Zhang, G.Q. (author)
Given the performance decay of high-power light-emitting diode (LED) chips over time and package condition changes, having a reliable output light for sensitive applications is a point of concern. In this study, a light feedback control circuit, including blue-selective photodiodes, for blue/ultraviolet (UV) LED, has been designed and...
journal article 2017
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Bui, T.H. (author), Nguyen, V.C. (author), Vollebregt, S. (author), Morana, B. (author), van Zeijl, H.W. (author), Chu Duc, Trinh (author), Sarro, P.M. (author)
The effect of the contact angle and radius of a microsize droplet on the surface acoustic wave (SAW) response for microfluidic applications is reported. It is studied through the dynamic change of the droplet shape during the evaporation process. An aluminium nitride SAW device, operating at 125.7 MHz, is utilized to investigate the...
journal article 2017
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Middelburg, L.M. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), Zhang, G.Q. (author), Poelma, R.H. (author)
In this work a method is described to investigate process variations across a wafer. Through wafer MEMS spiral resonators were designed, simulated, fabricated and characterized by measuring the eigenfrequency and corresponding mode shapes. Measuring the eigenfrequency and resulting spectral behavior of resonators on different locations on the...
conference paper 2017
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Cervone, A. (author), Zandbergen, B.T.C. (author), Cordeiro Guerrieri, D. (author), De Athayde Costa E Silva, M. (author), van Zeijl, H.W. (author)
The aerospace industry is recently expressing a growing interest in green, safe and non-toxic propellants for the propulsion systems of the new generation of space vehicles, which is especially true in the case of Cubesat micro-propulsion systems. Demanding requirements are associated to the future missions and challenges offered by this class...
journal article 2016
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Koladouz Esfahani, Z. (author), Rostamian, Ali (author), Kolahdouz, Mohammadreza (author), Ma, Teng (author), van Zeijl, H.W. (author), Zhang, Kouchi (author)
This study presents a blue light detector for evaluating the output light of phosphor based white LED package. It is composed of a silicon stripe-shaped photodiode designed and implemented in a 2 μm BiCMOS process which can be used for wafer level integration of different passive and active devices all in just 5 lithography steps. The final...
journal article 2016
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van Wees, T. (author), Hanselaar, C.A.J. (author), Jansen, E (author), Cervone, A. (author), Zandbergen, B.T.C. (author), van Zeijl, H.W. (author)
In the last decade, CubeSat development has shown the potential to allow for low-risk, low-cost space missions. To further improve the capabilities of CubeSats in large scale missions, a novel micro-propulsion system is being developed at Delft University of Technology. The system is based on a Vaporizing Liquid Microthruster (VLM), which is...
conference paper 2016
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Zhang, B. (author), Carisey, Y.C.P. (author), Damian, A. (author), Poelma, R.H. (author), Zhang, G.Q. (author), van Zeijl, H.W. (author)
We explore a methodology for patterned copper nanoparticle paste for 3D interconnect applications in wafer to wafer (W2W) bonding. A novel fine pitch thermal compression bonding process (sintering) with coated copper nanoparticle paste was developed. Most of the particle size is between 10-30 nm. Lithographically defined stencil printing using...
conference paper 2016
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Poelma, R.H. (author), Morana, B. (author), Vollebregt, S. (author), Schlangen, H.E.J.G. (author), Van Zeijl, H.W. (author), Fan, X. (author), Zhang, G.Q. (author)
The porous nature of carbon nanotube (CNT) arrays allows for the unique opportunity to tailor their mechanical response by the infiltration and deposition of nanoscale conformal coatings. Here, we fabricate novel photo-lithographically defined CNT pillars that are conformally coated with amorphous silicon carbide (a-SiC) to strengthen the...
journal article 2014
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Lafont, U. (author), Van Zeijl, H.W. (author), Van der Zwaag, S. (author)
While conventional self healing materials focus on the restoration of mechanical properties, newer generations of self healing materials focus on the restoration of other functional (i.e. non-mechanical) properties. Thermal conductivity is an example of an important functional property of a Thermal Interface Material (TIM) for LED’s and...
conference paper 2013
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Lafont, U.L. (author), Van Zeijl, H.W. (author), Van der Zwaag, S. (author)
While conventional self healing materials focus on the restoration of mechanical properties, newer generations of self healing materials focus on the restoration of other functional (i.e. non-mechanical) properties. Thermal conductivity is an example of an important functional property of a Thermal Interface Material (TIM) for LED’s and...
conference paper 2013
Searched for: author:"van Zeijl, H.W."
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