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Emadi, A. (author), Wu, H. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)
This paper presents the design, fabrication and characterization of Infra-Red (IR) Linear Variable Optical Filter (LVOF)-based micro-spectrometers. Two LVOF microspectrometer designs have been realized: one for operating in the 1400 nm to 2500 nm wavelength range and another between 3000 nm and 5000 nm. The IR LVOFs have been fabricated in an IC...
journal article 2013
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Wu, H. (author), Vollebregt, S. (author), Emadi, A. (author), De Graaf, G. (author), Ishihara, R. (author), Wolffenbuttel, R.F. (author)
A thermopile based detector array has advantages when used for an infrared (IR) micro-spectrometer, as compared to an array of photon detector, such as flat spectral response and uncooled operation. A thermal detector requires a good absorber to achieve a high absorption coefficient in the spectral range of interest. Several solutions are...
journal article 2011