Formation of nanopores in a SiN/SiO2 membrane with an electron beam

An electron beam can drill nanopores in SiO2 or silicon nitride membranes and shrink a pore to a smaller diameter. Such nanopores are promising for single molecule detection. The pore formation in a 40?nm thick silicon nitride?SiO2 bilayer using an electron beam with a diameter of 8?nm (full width of half height) was investigated by electron...

Deposition and atomic force microscopy of individual phthalocyanine polymers between nanofabricated electrodes