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Wu, M.Y. (author), Krapf, D. (author), Zandbergen, M. (author), Zandbergen, H. (author), Batson, P.E. (author)
An electron beam can drill nanopores in SiO2 or silicon nitride membranes and shrink a pore to a smaller diameter. Such nanopores are promising for single molecule detection. The pore formation in a 40?nm thick silicon nitride?SiO2 bilayer using an electron beam with a diameter of 8?nm (full width of half height) was investigated by electron...
journal article 2005
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Storm, A.J. (author), Chen, J.H. (author), Ling, X.S. (author), Zandbergen, H.W. (author), Dekker, C. (author)
The imaging beam of a transmission electron microscope can be used to fine tune critical dimensions in silicon oxide nanostructures. This technique is particularly useful for the fabrication of nanopores with single-nanometer precision, down to 2 nm. We report a detailed study on the effect of electron-beam irradiation on apertures with various...
journal article 2005