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Yan, B. (author), Pham, H.T.M. (author), Ma, Y. (author), Zhuang, Y. (author), Sarro, P.M. (author)
The authors demonstrate a method for the fabrication of in situ ultrathin porous anodic aluminum oxide layers (aspect ratio<2:1) on Si, which can be directly used as templates for nanodot preparation and for pattern transfer. The regular shape of the aluminum oxide pores is maintained even when the thickness of the aluminum oxide template is...
journal article 2007