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Meskers, A.J.H. (author), Spronck, J.W. (author), Munnig Schmidt, R.H. (author)
The use of optical fibers presents several advantages with respect to free-space optical transport regarding sourcefrequency delivery to individual heterodyne interferometers. Unfortunately, fiber delivery to individual coaxial heterodyne interferometers leads to an increase of (periodic) nonlinearity in the measurement, because transporting...
journal article 2014
document
Meskers, A.J.H. (author), Spronck, J.W. (author), Munnig Schmidt, R.H. (author)
Periodic nonlinearity (PNL) in displacement interferometers is a systematic error source that limits measurement accuracy. The PNL of coaxial heterodyne interferometers is highly influenced by the polarization state and orientation of the source frequencies. In this Letter, we investigate this error source and discuss two interferometer designs,...
journal article 2014
document
Hermosa, N. (author), Rosales-Guzman, C. (author), Pereira, S.F. (author), Torres, J.P. (author)
We demonstrate an optical scheme for measuring the thickness of thin nanolayers with the use of light beam’s spatial modes. The novelty in our scheme is the projection of the beam reflected by the sample onto a properly tailored spatial mode. In the experiment described below, we are able to measure a step height smaller than 10 nm, i.e., one...
journal article 2014
document
Swinkels, B.L. (author), Bhattacharya, N. (author), Braat, J.J.M. (author)
Absolute distance measurements can be performed with an interferometric method that uses only a single tunable laser. This method has one major drawback, because a small target movement of the order of one wavelength during a measurement will be interpreted as a movement of one synthetic wavelength. This effect is usually mitigated by adding a...
journal article 2005
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