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Ellis, J.D. (author), Joo, K.N. (author), Spronck, J.W. (author), Munnig Schmidt, R.H. (author)
We describe two different, double-sided interferometer designs for measuring material stability. Both designs are balanced interferometers where the only optical path difference is the sample and the reference beams are located within the interferometer. One interferometer is a double-pass design, whereas the other is a single-pass system. Based...
journal article 2009
document
Joo, K.N. (author), Ellis, J.D. (author), Spronck, J.W. (author), Van Kan, P.J.M. (author), Munnig Schmidt, R.H. (author)
We describe a simple heterodyne laser interferometer that has subnanometer periodic errors and is applicable to industrial fields. Two spatially separated beams can reduce the periodic errors, and the use of a right-angle prism makes the optical configuration much simpler than previous interferometers. Moreover, the optical resolution can be...
journal article 2009