CMOS integrator based lock-in pixel for heterodyne interferometry

This article presents a prototype of a CMOS phase sensor for high accuracy (1 Angstrom) heterodyne interferometry. Switched integrators realization of a lock-in pixel for 4-bucket phase detection algorithm is described and illustrated by experimental results. Factors that limit the accuracy of this implementation and possible ways for its...

Phase extraction from three interferograms with different unknown tilts

We propose an algorithm for phase retrieval from three interferograms which differ only by an arbitrary unknown tilt terms in the phase. The method is illustrated by examples.