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Ma, X (author), Kato, Y (author), Hirai, Y (author), van Kempen, F.C.M. (author), van Keulen, A. (author), Tsuchiya, T (author), Tabata, O (author)Digital Micromirror Device (DMD)-based grayscale lithography is a promising tool for three dimensional (3D) microstructuring of thick-film photoresist since it is a maskless process, provides possibility for the free-form of 3D microstructures, and therefore rapid and cost-effective microfabrication. However, process parameter determination...conference paper 2015
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Ma, X (author), Kato, Y (author), van Kempen, F.C.M. (author), Hirai, Y (author), Tsuchiya, T (author), van Keulen, A. (author), Tabata, O (author)We report a multiple patterning approach utilizing digital-micromirror-device (DMD)-based grayscale lithography, providing a solution to improve fabrication accuracy for entire target three-dimensional structure. Because DMD-based lithography system consists a projection lens system, better resolution can be obtained around focal position...conference paper 2015