Searched for: collection%3Air
(1 - 4 of 4)
document
Meskers, A.J.H. (author)
Lithographic exposure equipment for integrated circuit manufacturing requires ever more accurate position measurement systems, which is currently led by the advent of Extreme UltraViolet (EUV)-lithography machines. This PhD-research describes an interferometric displacement measurement system that possess the potential to foresee in the need for...
doctoral thesis 2014
document
Meskers, A.J.H. (author), Spronck, J.W. (author), Munnig Schmidt, R.H. (author)
The use of optical fibers presents several advantages with respect to free-space optical transport regarding sourcefrequency delivery to individual heterodyne interferometers. Unfortunately, fiber delivery to individual coaxial heterodyne interferometers leads to an increase of (periodic) nonlinearity in the measurement, because transporting...
journal article 2014
document
Meskers, A.J.H. (author), Spronck, J.W. (author), Munnig Schmidt, R.H. (author)
Periodic nonlinearity (PNL) in displacement interferometers is a systematic error source that limits measurement accuracy. The PNL of coaxial heterodyne interferometers is highly influenced by the polarization state and orientation of the source frequencies. In this Letter, we investigate this error source and discuss two interferometer designs,...
journal article 2014
document
Ellis, J.D. (author), Meskers, A.J.H. (author), Spronck, J.W. (author), Munnig Schmidt, R.H. (author)
Displacement interferometry is widely used for accurately characterizing nanometer and subnanometer displacements in many applications. In many modern systems, fiber delivery is desired to limit optical alignment and remove heat sources from the system, but fiber delivery can exacerbate common interferometric measurement problems, such as...
journal article 2011
Searched for: collection%3Air
(1 - 4 of 4)