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Ellis, J.D. (author), Meskers, A.J.H. (author), Spronck, J.W. (author), Munnig Schmidt, R.H. (author)
Displacement interferometry is widely used for accurately characterizing nanometer and subnanometer displacements in many applications. In many modern systems, fiber delivery is desired to limit optical alignment and remove heat sources from the system, but fiber delivery can exacerbate common interferometric measurement problems, such as...
journal article 2011