Superconducting Coplanar Waveguide Filters for Submillimeter Wave On-Chip Filterbank Spectrometers

We show the first experimental results which prove that superconducting NbTiN coplanar–waveguide resonators can achieve a loaded Q factor in excess of 800 in the 350 GHz band. These resonators can be used as narrow band pass filters for on-chip filter bank spectrometers for astronomy. Moreover, the low-loss coplanar waveguide technology provides...

The non-equilibrium response of a superconductor to pair-breaking radiation measured over a broad frequency band

We have measured the absorption of terahertz radiation in a BCS superconductor over a broad range of frequencies from 200 GHz to 1.1 THz, using a broadband antenna-lens system and a tantalum microwave resonator. From low frequencies, the response of the resonator rises rapidly to a maximum at the gap edge of the superconductor. From there on,...

High optical efficiency and photon noise limited sensitivity of microwave kinetic inductance detectors using phase readout

We demonstrate photon noise limited performance in both phase and amplitude readout in microwave kinetic inductance detectors (MKIDs) consisting of NbTiN and Al, down to 100 fW of optical power. We simulate the far field beam pattern of the lens-antenna system used to couple radiation into the MKID and derive an aperture efficiency of 75%. This...

On-chip filter bank spectroscopy at 600–700?GHz using NbTiN superconducting resonators

We experimentally demonstrate the principle of an on-chip submillimeter wave filter bank spectrometer, using superconducting microresonators as narrow band-separation filters. The filters are made of NbTiN/SiNx/NbTiN microstrip line resonators, which have a resonance frequency in the range of 614-685?GHz, two orders of magnitude higher in...

Microwave-induced excess quasiparticles in superconducting resonators measured through correlated conductivity fluctuations

We have measured the number of quasiparticles and their lifetime in aluminium superconducting microwave resonators. The number of excess quasiparticles below 160?mK decreases from 72 to 17??m?3 with a 6?dB decrease of the microwave power. The quasiparticle lifetime increases accordingly from 1.4 to 3.5?ms. These properties of the superconductor...

Design of an integrated filterbank for DESHIMA: On-chip submillimeter imaging spectrograph based on superconducting resonators

An integrated filterbank (IFB) in combination with microwave kinetic inductance detectors (MKIDs), both based on superconducting resonators, could be used to make broadband submillimeter imaging spectrographs that are compact and flexible. In order to investigate the possibility of adopting an IFB configuration for DESHIMA (Delft SRON High...

Generation-recombination noise: The fundamental sensitivity limit for kinetic inductance detectors

We present measurements of quasiparticle generation-recombination noise in aluminium Microwave Kinetic Inductance Detectors, the fundamental noise source for these detectors. Both the quasiparticle lifetime and the number of quasiparticles can be determined from the noise spectra. The number of quasiparticles saturates to 10 ?m?3 at temperatures...

Number Fluctuations of Sparse Quasiparticles in a Superconductor

We have directly measured quasiparticle number fluctuations in a thin film superconducting Al resonator in thermal equilibrium. The spectrum of these fluctuations provides a measure of both the density and the lifetime of the quasiparticles. We observe that the quasiparticle density decreases exponentially with decreasing temperature, as...

Minimal resonator loss for circuit quantum electrodynamics

We report quality factors of up to 500x10³ in superconducting resonators at the single photon levels needed for circuit quantum electrodynamics. This result is achieved by using NbTiN and removing the dielectric from regions with high electric fields. As demonstrated by a comparison with Ta, the crucial sources of intensity-dependent loss are...

Quasiparticle relaxation in high Q superconducting resonators

We present measurements of the quasiparticle relaxation time in Ta superconducting films shaped as planar resonators using the response of the complex conductivity to photon flux. These films have been implanted with magnetic (Mn) as well as non-magnetic atoms (Al). We find a significant decrease of the relaxation time with increasing impurity...

Noise in NbTiN, Al, and Ta Superconducting Resonators on Silicon and Sapphire Substrates

We present measurements of the frequency noise and resonance frequency temperature dependence in planar superconducting resonators on both silicon and sapphire substrates. We show, by covering the resonators with sputtered SiOx layers of different thicknesses, that the temperature dependence of the resonance frequency scales linearly with...

Enhancement of quasiparticle recombination in Ta and Al superconductors by implantation of magnetic and nonmagnetic atoms

The quasiparticle recombination time in superconducting films, consisting of the standard electron-phonon interaction and a yet to be identified low-temperature process, is studied for different densities of magnetic and nonmagnetic atoms. For both Ta and Al, implanted with Mn, Ta, and Al, we observe an increase in the recombination rate. We...

Quasiparticle Relaxation in Optically Excited High-Q Superconducting Resonators

The quasiparticle relaxation time in superconducting films has been measured as a function of temperature using the response of the complex conductivity to photon flux. For tantalum and aluminum, chosen for their difference in electron-phonon coupling strength, we find that at high temperatures the relaxation time increases with decreasing...

Contribution of dielectrics to frequency and noise of NbTiN superconducting resonators

We study NbTiN resonators by measurements of the temperature dependent resonance frequency and frequency noise. Additionally, resonators are studied covered with SiOx dielectric layers of various thicknesses. The resonance frequency develops a nonmonotonic temperature dependence with increasing SiOx layer thickness. The increase in the noise is...