On-chip filter bank spectroscopy at 600–700?GHz using NbTiN superconducting resonators

We experimentally demonstrate the principle of an on-chip submillimeter wave filter bank spectrometer, using superconducting microresonators as narrow band-separation filters. The filters are made of NbTiN/SiNx/NbTiN microstrip line resonators, which have a resonance frequency in the range of 614-685?GHz, two orders of magnitude higher in...

Microwave-induced excess quasiparticles in superconducting resonators measured through correlated conductivity fluctuations

We have measured the number of quasiparticles and their lifetime in aluminium superconducting microwave resonators. The number of excess quasiparticles below 160?mK decreases from 72 to 17??m?3 with a 6?dB decrease of the microwave power. The quasiparticle lifetime increases accordingly from 1.4 to 3.5?ms. These properties of the superconductor...

Reduced frequency noise in superconducting resonators

We report a reduction in the frequency noise in coplanar waveguide superconducting resonators. The reduction of 7 dB is achieved by removing the exposed dielectric substrate surface from the region with high electric fields and by using NbTiN. In a model-analysis the surface of NbTiN is found to be a negligible source of noise, experimentally...

Minimal resonator loss for circuit quantum electrodynamics

We report quality factors of up to 500x10³ in superconducting resonators at the single photon levels needed for circuit quantum electrodynamics. This result is achieved by using NbTiN and removing the dielectric from regions with high electric fields. As demonstrated by a comparison with Ta, the crucial sources of intensity-dependent loss are...

Noise in NbTiN, Al, and Ta Superconducting Resonators on Silicon and Sapphire Substrates

We present measurements of the frequency noise and resonance frequency temperature dependence in planar superconducting resonators on both silicon and sapphire substrates. We show, by covering the resonators with sputtered SiOx layers of different thicknesses, that the temperature dependence of the resonance frequency scales linearly with...

Contribution of dielectrics to frequency and noise of NbTiN superconducting resonators

We study NbTiN resonators by measurements of the temperature dependent resonance frequency and frequency noise. Additionally, resonators are studied covered with SiOx dielectric layers of various thicknesses. The resonance frequency develops a nonmonotonic temperature dependence with increasing SiOx layer thickness. The increase in the noise is...