Substrate-dependent quasiparticle recombination time in superconducting resonators

We demonstrate an increased quasiparticle recombination time in superconducting resonators on a SiNx membrane, compared to identical resonators on a SiNx/Si wafer. An interpretation is given using a thermal model of the membrane. Using an array of tunnel junctions to cool or heat the membrane, we show that the resonators on the membranes are...

Epitaxial aluminum nitride tunnel barriers grown by nitridation with a plasma source

High critical current-density (10?to?420?kA/cm2) superconductor-insulator-superconductor tunnel junctions with aluminum nitride barriers have been realized using a remote nitrogen plasma from an inductively coupled plasma source operated in a pressure range of 10?3–10?1?mbar. We find a much better reproducibility and control compared to previous...