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Neklyudova, M. (author), Erdamar, A.K. (author), Vicarelli, L. (author), Heerema, S.J. (author), Rehfeldt, T. (author), Pandraud, G. (author), Koladouz Esfahani, Z. (author), Dekker, C. (author), Zandbergen, H.W. (author)
We present a technique to fabricate ultrathin (down to 20 nm) uniform electron transparent windows at dedicated locations in a SiN membrane for in situ transmission electron microscopy experiments. An electron-beam (e-beam) resist is spray-coated on the backside of the membrane in a KOH-etched cavity in silicon which is patterned using...
journal article 2017