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Hesam Mahmoudi Nezhad, N. (author)The design of electrostatic charged particle lenses involves changing many geometrical parameters of the lens electrodes as well as changing the voltages at each lens electrodes. The objective of the design is often to get the electrons passing through the lens system to be focused at a specific point and to minimize the aberrations of the lens....doctoral thesis 2024
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Jeevanandam, G. (author)The work described in the doctoral thesis aims to enhance the functionality of a scanning electron microscope (SEM) by integrating miniaturized versions of cleanroom tools used in microfabrication. The thesis presents the integration of substrate heating, in-situ thermal atomic layer deposition (ALD), sputtering, and thermal evaporation within...doctoral thesis 2024
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Zuidema, W. (author)In this thesis, the design and engineering considerations for a multi-beam scanning electron microscope (MBSEM) are discussed. This microscope can benefit biological research in various ways. It can give new insights into the inner workings of a multitude of biological systems that were hard to get using previously existing instrumentation. For...doctoral thesis 2023
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Mahgoub, A.M.I.M. (author)Focused electron beam induced processing (FEBIP) comprising FEBID (deposition) and FEBIE (etching) is a direct write or etch, single step technique for high resolution nano-patterning. The whole process takes place inside a single tool, the scanning electron microscope (SEM). A focused electron beam hits the sample in the presence of a precursor...doctoral thesis 2023
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Garming, M.W.H. (author)Scanning electron microscopes (SEMs) can capture detail on the single nanometer length scale through the interaction of a tightly focused electron beam with a sample, but this impressive spatial resolution is not matched with a capability to resolve dynamic processes on the ultrafast time scale. A variety of processes occur at nanosecond and...doctoral thesis 2022
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van Kessel, L.C.P.M. (author)Electrons with an energy ranging from 0 to 50 keV are among the most versatile tools in nanotechnology. A common example is the scanning electron microscope (SEM), which focuses an electron beam with an energy ranging from several hundred eV to tens of keV on a sample. When landing on the sample, the electrons in the beam penetrate the material....doctoral thesis 2022
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Weppelman, I.G.C. (author)This thesis is dedicated to the development of a beam blanker for Ultrafast Electron Microscopy. Ultrafast electron microscopy aims to resolve structural dynamics at the nanometer and (sub) picosecond time scale. In these temporal and spatial scales many important processes in physics, chemistry and biology do occur. Examples of these are the...doctoral thesis 2021
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Arat, K.T. (author)Integrated circuit (IC) technology lies at the heart of today’s digital world. The immense amount of computational power that came along with the downscaling of circuits allowed us to place faster and smaller chips almost everywhere. However, with today’s requirements, even a one-nanometer error on those chips can drastically change the...doctoral thesis 2021
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Krielaart, M.A.R. (author)We propose a microscopy scheme for the controlled modulation of the electron wave front that utilizes patterned electron mirrors. The ability to control the wave front of the electron finds many applications in electron microscopy, for instance in contrast enhancement techniques, beam mode conversion, low-dose imaging techniques such as quantum...doctoral thesis 2021
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Scotuzzi, M. (author)To follow Moore’s law and the trend of devices to keep shrinking, the nanotechnology industry is challenged in finding a suitable technique for the mass production of integrated circuits with critical dimension in the sub-10 nm range. At the time this project started, EUV lithography, that employs light with a wavelength of 13.5 nm and thus...doctoral thesis 2019
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Hari, S. (author)Focussed Electron Beam Induced Processing is a high resolution direct-write nanopatterning technique. Its ability to fabricate sub-10 nm structures together with its versatility and ease of use, in that it is resist-free and implementable inside a Scanning Electron Microscope, make it attractive for a variety of applications in nanofabrication....doctoral thesis 2017
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Ren, Y. (author)The goal of this Ph.D. research is to develop imaging systems for the multiple beam scanning electron microscope (MBSEM) built in Delft University of Technology. This thesis includes two imaging systems, transmission electron (TE) imaging system, and secondary electron (SE) imaging system. The major conclusions, key results and some suggestions...doctoral thesis 2017
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- van Kouwen, L. (author) doctoral thesis 2017
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- Zonnevylle, A.C. (author) doctoral thesis 2017
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- Verduin, T. (author) doctoral thesis 2017
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- Jun, D.S. (author) doctoral thesis 2014
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Liv, N. (author)A combined use of fluorescence and light microscopy is a powerful approach to further increase our understanding in biological systems of structure-function relations at cellular and sub-cellular levels. The power of fluorescence microscopy (FM) is to spectrally resolve and visualize individual proteins with endogenous or immuno- fluorescent...doctoral thesis 2014
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Narváez, A.C. (author)Cathodoluminescence (CL), the excitation of light by an electron beam, has gained attention as an analysis tool for investigating the optical response of a structure, at a resolution that approaches that in electron microscopy, in the nanometer range. However, the application possibilities are limited because the use of transparent substrates,...doctoral thesis 2014
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- Cook, B.J. (author) doctoral thesis 2013
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Mohammadi-Gheidari, A. (author)In this thesis, for the first time ever, it is demonstrated that 196 beams out of a single electron source can be finely focused onto the sample using the electron optics of a standard single beam SEM. During this PhD thesis, a multi beam scanning electron (MBSEM) was designed and built. The thesis starts with a explanation of the driving force...doctoral thesis 2013
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