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Verloop, W.A. (author)
In this Thesis report the modeling, design, simulation, fabrication and measurements done at the Resonant Air Quality Sensor is described. The sensor is based on a resonant system, made in a silicon wafer with MEMS technology. By depositing the particles to be measured on top of the mass, the total mass of these particles can be measured by...
master thesis 2013
Mathew, T.V. (author)
master thesis 2011
Hao, J. (author)
master thesis 2009