Searched for: contributor%3A%22Janssen%2C+G.C.A.M.+%28promotor%29%22
(1 - 1 of 1)
document
Machunze, R. (author)
Thin metal nitride films deposited by Physical Vapor Deposition (PVD) are used amongst many other applications as wear protective coatings in tool industry or as diffusion barriers in integrated circuit technology. Typically these films exhibit a residual in-plane stress when deposited onto rigid substrates such as silicon wafers or cutting...
doctoral thesis 2010