Searched for: contributor:"Kruit, P. (promotor)"
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Hari, S. (author)
Focussed Electron Beam Induced Processing is a high resolution direct-write nanopatterning technique. Its ability to fabricate sub-10 nm structures together with its versatility and ease of use, in that it is resist-free and implementable inside a Scanning Electron Microscope, make it attractive for a variety of applications in nanofabrication....
doctoral thesis 2017
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Ren, Y. (author)
The goal of this Ph.D. research is to develop imaging systems for the multiple beam scanning electron microscope (MBSEM) built in Delft University of Technology. This thesis includes two imaging systems, transmission electron (TE) imaging system, and secondary electron (SE) imaging system. The major conclusions, key results and some suggestions...
doctoral thesis 2017
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van Kouwen, L. (author)
doctoral thesis 2017
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Zonnevylle, A.C. (author)
doctoral thesis 2017
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Verduin, T. (author)
doctoral thesis 2017
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Jun, D.S. (author)
doctoral thesis 2014
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Liv, N. (author)
A combined use of fluorescence and light microscopy is a powerful approach to further increase our understanding in biological systems of structure-function relations at cellular and sub-cellular levels. The power of fluorescence microscopy (FM) is to spectrally resolve and visualize individual proteins with endogenous or immuno- fluorescent...
doctoral thesis 2014
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Narváez, A.C. (author)
Cathodoluminescence (CL), the excitation of light by an electron beam, has gained attention as an analysis tool for investigating the optical response of a structure, at a resolution that approaches that in electron microscopy, in the nanometer range. However, the application possibilities are limited because the use of transparent substrates,...
doctoral thesis 2014
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Mohammadi-Gheidari, A. (author)
In this thesis, for the first time ever, it is demonstrated that 196 beams out of a single electron source can be finely focused onto the sample using the electron optics of a standard single beam SEM. During this PhD thesis, a multi beam scanning electron (MBSEM) was designed and built. The thesis starts with a explanation of the driving force...
doctoral thesis 2013
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Cook, B.J. (author)
doctoral thesis 2013
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Castaldo, V. (author)
The structure of the thesis is the following. The first chapter is an introduction to scanning microscopy, where the path that led to the Focused Ion Beam (FIB) is described and the main differences between electrons and ion beams are highlighted. Chapter 2 is what is normally referred to (which I do not really like) as ‘the theory chapter’. The...
doctoral thesis 2011
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Sidorkin, V.A. (author)
The research work described in this thesis deals with studying the ultimate resolution capabilities of electron and ion beam lithography (EBL and IBL respectively) with a focus on resist and exposure processes. The aim of this research was to enlarge knowledge and improve methods on the formation of ultra-high resolution structures. Research sub...
doctoral thesis 2010
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Dokania, A.K. (author)
In this thesis an attempt is made to make a step forward in the development of next a generation scanning electron lithography machine for sub 25nm chip making. One of the challenges for such a system is to have sufficient beam-lets with enough current for parallel writing which requires a sufficiently bright electron source. Since the present...
doctoral thesis 2010
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Bronsgeest, M.S. (author)
doctoral thesis 2009
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Botman, A.P.J.M. (author)
Electron beam induced deposition (EBID) is a novel nanofabrication technique allowing the rapid prototyping of three-dimensional nanodevices and the metallic wiring of nanostructures, and is a promising technique for many applications in nanoresearch. EBID is a process wherein a precursor molecule containing the material to be deposited is...
doctoral thesis 2009
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Grigorescu, A.E. (author)
The continuous shrinking of the feature size forces scientists and engineers to develop new lithographic techniques and suitable materials which can meet the requirements of the market. Despite its low throughput, EBL remains the number one candidate when writing very small structures. Achieving ultimate resolution with EBL requires not only a...
doctoral thesis 2009
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Zhang, Y. (author)
doctoral thesis 2008
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Van Dorp, W.F. (author)
Work started with a critical review of literature from the past 70-odd years. The review shows that the physical processes occurring in EBID are generally well understood. By combining models for electron scattering in a solid and electron beam induced heating and knowledge of growth regimes, the majority of the experimental results was...
doctoral thesis 2008
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Van Bruggen, M.J. (author)
The development of a multi-electron beam system is described which is dedicated for electron beam induced deposition (EBID) with sub-10 nm resolution. EBID is a promising mask-less nanolithography technique which has the potential to become a viable technique for the fabrication of 20-2 nm structures after 2013, as described by the International...
doctoral thesis 2008
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Tondare, V.N. (author)
Abstract not available
doctoral thesis 2006
Searched for: contributor:"Kruit, P. (promotor)"
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