Searched for: contributor:"Kruit, P. (promotor)"
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Grigorescu, A.E. (author)
The continuous shrinking of the feature size forces scientists and engineers to develop new lithographic techniques and suitable materials which can meet the requirements of the market. Despite its low throughput, EBL remains the number one candidate when writing very small structures. Achieving ultimate resolution with EBL requires not only a...
doctoral thesis 2009