Searched for: contributor:"Kruit, P. (promotor)"
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Dokania, A.K. (author)
In this thesis an attempt is made to make a step forward in the development of next a generation scanning electron lithography machine for sub 25nm chip making. One of the challenges for such a system is to have sufficient beam-lets with enough current for parallel writing which requires a sufficiently bright electron source. Since the present...
doctoral thesis 2010