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Mohammadi-Gheidari, A. (author)
In this thesis, for the first time ever, it is demonstrated that 196 beams out of a single electron source can be finely focused onto the sample using the electron optics of a standard single beam SEM. During this PhD thesis, a multi beam scanning electron (MBSEM) was designed and built. The thesis starts with a explanation of the driving force...
doctoral thesis 2013