"uuid","repository link","title","author","contributor","publication year","abstract","subject topic","language","publication type","publisher","isbn","issn","patent","patent status","bibliographic note","access restriction","embargo date","faculty","department","research group","programme","project","coordinates" "uuid:23221904-c9c1-4537-af7f-abdbb9df06ed","http://resolver.tudelft.nl/uuid:23221904-c9c1-4537-af7f-abdbb9df06ed","Individual beam control in multi electron beam systems","Zonnevylle, A.C. (TU Delft ImPhys/Charged Particle Optics)","Kruit, P. (promotor); Delft University of Technology (degree granting institution)","2017","","","en","doctoral thesis","","978-94-6186-783-4","","","","","","","","","ImPhys/Charged Particle Optics","","",""