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Kramer, Robert (author)
Suspended hollow micro-cantilevers have been employed for zeptogram (10^-21 g) mass measurements, pipetting of femtoliter<br/>(10^-15 L) volumes, and studies on mechanical interaction with single cells. The main fabrication method of these devices is by standard clean room micro/nano fabrication techniques, however, they are inherently planar,...
master thesis 2018