A Wireless Sensor Network for Machine Dynamics Performance Monitoring

The availability of photolithography machines is key in the semiconductor industry, as downtime generally incurs in immense economic loss. Time to market is also very important for suppliers of photolithography systems, such as ASML. Photolithography machines include numerous measurement systems that are frequently used for qualification and...

A 15-bit ΔΣ Capacitance-to-Digital Converter For Position Sensing with Electrically Floating Targets

This thesis presents a capacitive sensing technique which is suitable for measuring small displacements with one floating target electrode. A capacitive sensor interface, which does not require electrical contact with the target, while demonstrating performance comparable with the state-of-the-art, is proposed. The designed prototype is intended...