Design & Modeling of a MEMS Contact-mode Piezoresistive Detector for Pull-in Acceleration Sensing

Recently a new kind of accelerometer was developed. The accelerometer uses the pull-in time to measure the accelerations. However most of the applied measurement techniques for this kind of accelerometers had shown some drawbacks in the working process. So in this dissertation a new measurement method is introduced based on piezoresistivity to...

Design and Modeling of Decoupled and Tunable Bandwidth (40-330 Hz) MEMS Vibratory Gyroscopes

This thesis reports on the design and modeling of decoupled and tunable bandwidth MEMS vibratory gyroscopes that were designed for the medical applications of tremor compensation and micro-surgical tool navigation. Two different designs are presented. The first design is a dual mass de-coupled gyroscope that consists of a drive and sense mass...