Passive film thickness control in hydrodynamic lubrication on non-flat surfaces

Nanoimprinting is a manufacturing method to replicate micro- and nanotextures on large-area substrates with ultraviolet-curable resins. Significant potential of large-area nanopatterning lies in its capacity to greatly enhance the performance of an abundance of devices and foster the creation of cutting-edge products. However, current large-area...

Development and prototype of a textured nanoimprinted air bearing system

Silicon wafers and solar cells are delicate components used in the semiconductor industries and energy industries. Handling and transportation can easily damage these components. Conventional handling methods with mechanical contact can cause various damages to these delicate surfaces. Air bearings can provide a solution by enabling an almost...

Development of a novel manufacturing method for a contactless handling system using a variable outlet restriction

Improved handling methods are required in order to decrease the manufacturing cost of solar cells and flat panel display. A potential method would be to use a contactless handling system based on air bearing technology. As the name implies, the substrate levitates on a thin film (~10 μm) of air. The viscous shear force is used to exert a lateral...

Large-scale overlay: a study into accuracies in roll-to-plate nanoimprint lithography

Roll-to-Plate (R2P) nanoimprint lithography (NIL) is a fabrication process with the potential for low-cost high-volume fabrication of micro- and nano-patterns on large areas. As a result, R2P is regarded as a promising production process for micro- and nano-scale features which exceed the conventional wafer sizes. In addition, the process has...