Defects and thermal stability of nanothin Cu films on Mo and Ta

In situ thermal helium desorption spectrometry (THDS) has been used to characterize defects and thermal stability of nanothin Cu films (0.5-30 nm) deposited on Mo and Ta by electron beam evaporation in ultrahigh vacuum. The substrates used were Mo(110), Mo(100), polycrystalline Mo, Ta(110) and Ta(100). Cu/Mo and Cu/Ta are heteroepitaxial systems...