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document
Song, Y. (author)
This work investigates the enhancement of photocatalytic activity of titanium dioxide (TiO2) commercial particles by ultrathin silicon dioxide (SiO2) films deposited via atmospheric pressure atomic layer deposition (ALD) carried out in fluidized bed reactor (FBR). The ALD process enabled precise control for the growth of ultrathin film at sub...
master thesis 2017
document
Song, Y. (author)
A precise control for the growth of thin film powered by atmospheric pressure atomic layer deposition (ALD) carried out in fluidized bed reactor makes the ultrathin conformal coating of SiO2 on Degussa P25 TiO2 nanoparticles possible. At an operating temperature which can be lowered to room temperature (~27°C), the growth per cycle (GPC) smaller...
master thesis 2017