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Janssen, R. (author)
doctoral thesis 2021
Janssen, T.M.L. (author)
In a semiconductor factory, integrated circuits (or chips) are constructed on top of slabs of silicon, called wafers. The construction of these wafers is complicated and many different processing steps are needed to gradually building the chip layer by layer. Of these steps, photolithography uses the most expensive equipment. Therefore, the...
doctoral thesis 2019