Precise Data-Driven Modelling of Reticle Heating Induced Spatial Deformations for Correcting Non-Moving Average Effects

In the thesis, the challenge of precisely developing a data-driven Linear Time Invariant MIMO Reticle Heating Induced Deformation Prediction (RHIDP) model for ASML's DUV systems is presented. The model is developed for two inputs, namely airflow temperature and dose for full field exposures. A reduced order data-driven based approach for...